The SIMS workshop series was begun in 1987 as an informal gathering for users of the technique of Secondary Ion Mass Spectrometry (SIMS). The goal of the workshop is to provide an informal forum for the interchange of practical information about SIMS. Sessions are typically devoted to methods of analysis, instrumentation and fundamentals. Special topic tutorial sessions are held on new and emerging aspects of the technique. This year, in addition to the usual contributed sessions, two special sessions are planned. The first will be devoted to the rapidly growing field of TOF-SIMS. Tutorials are planned on TOF-SIMS instrumentation, spectral interpretation, spectral databases and applications in semiconductor characterization, biological tissue analysis, organic compound characterization and polymers. The second special session will be devoted to semiconductor characterization by dynamic SIMS with emphasis on the characterization of ion implanted samples and the use of ion implants as standards. We will also have a session devoted to organization of SIMS XI.

The workshop will be held at the Sheraton Hotel and Conference Center in Burlington, Vermont. Burlington is nestled in the Champlain Valley of Northern Vermont, surrounded by the majestic Green Mountains overlooking Lake Champlain. The hotel is located just 5 minutes from Burlington International Airport and five minutes from the downtown area and Lake Champlain. Rooms have been blocked at the Sheraton at a discounted rate of $97.00 for either single or double rooms. Please make your reservations by contacting the hotel directly at (800) 677-6576 or (802) 865-6600, or by using Sheraton Worldwide Reservations at (800) 325-3535. Be sure to mention you are with the SIMS Workshop in order to obtain the group rate. The deadline for hotel reservations is May 12, 1996.

Burlington Vermont Home Page

Conference Hotel Information

Current Local Weather in Burlington

Burlington International Airport is located five minutes from the Sheraton. Major Airlines that service Burlington include Continental Airlines, US Air, United, and Delta Business Express. Currently direct air service is available to and from New York City, Boston, Washington, DC, Chicago, Pittsburgh, Albany, Philadelphia and Cincinnati offering over 60 flights a day. Amtrak Service is also available to Essex Junction, Vermont.

The Sheraton Hotel in Burlington provides complimentary shuttle service to and from the Burlington International Airport. When you arrive at the airport, a courtesy phone is available to make the necessary arrangements for pick-up.

To get to the Sheraton from the Airport via car: Take left out of the airport parking lot, go straight until you come to the traffic light. Take a right at the light on Route 2 or Williston Road. Travel about 2 miles on Williston Road and the Sheraton is located on the right just after you go over the interstate.


Mileage from Burlinton:

Albany, NY--- 147 Miles
Boston, MA--- 223 Miles
Chicago, IL --- 962 Miles
Hartford, CT --- 222 Miles
Montreal, P.Q. --- 97 Miles
New York, NY --- 293 Miles
Portland, ME --- 208 Miles
Philadelphia, PA --- 393 Miles
Syracuse, NY --- 250 Miles
Washington, D.C. ---528 Miles

From the Boston Area: Interstate #93 North to Concord, NH. Interstate #89 North through New Hampshire into Vermont. Exit 14W onto Williston Rd/Route 2. Sheraton is on the right. Approximate drive time from downtown Boston - 3.5 hours.

From the Hartford Area: Interstate #91 North through Connecticut, Massachussetts and into Vermont. Pick up Interstate #89 North (in the Lebanon/White River Junction area) to Burlington. Exit 14W- Same as above. Approximate drive time from Hartford- 4 hours.

From New York City: Take Interstate #87 North to Albany. In Albany continue on #87 (the Northway) to exit 20 (Fort Ann/Whitehall). Take Route 149 (east/north) through Fort Ann to Whitehall. In Whitehall, pick up Route 4 (north/east). Follow Route 4 into Vermont. Once in Vermont, take first exit for Route 22A (Fair Haven exit). Follow Route 22A North to Vergennes. In Vergennes take Route 7 North to Burlington. In South Burlington take 189 connector to Interstate 89 North. Take exit 14W and the Sheraton is on the right. Approximate drive time from New York - 6 hours.

From Montreal Quebec: Go over Champlain Bridge, keep right, look for sign to Interstate #89 South. Exit 14W same as above.

From Portland Maine to Burlington: Route 2 West to 89 North to Montpelier. Exit 14W - Same as above.

The registration fee for the Workshop is $150.00. This fee includes morning and afternoon breaks, meeting space fees, registration mixer, dinner on Monday, scenic boat cruise with dinner on Tuesday, and at least one lunch. It also covers the proceedings booklet. Please complete the meeting registration form and send with mail with payment.

Abstracts are being solicited for both oral and poster presentations. Your abstract will appear in the final program. Please format as follows.

Names of Authors, affiliation, address

Text of Abstract
Do not exceed 2 pages including figures and references. Abstracts should be vertical orientation (portrait) on 8.5" x 11.0" paper. Provide margins of one inch all around. Please print and fill-out the abstract submission form, enclose your abstract and mail to:

If you do not wish to present a full paper you are encouraged to bring a few viewgraphs of your recent research or questions you might like to ask your fellow SIMS users during our open discussion sessions.

If you are interested in preparing a full-length reviewed article for submission, arrangements have been made with the Journal of the American Society for Mass Spectrometry for publication of papers presented at the workshop in a regular issue of the journal. Contact the conference office for details on requirements for article submission.

Conference Office
SIMS Workshop
1201 Don Diego Avenue
Santa Fe New Mexico 87505
Phone: 505-989-4735
Fax: 505-989- 1073
Email: 70404.2407@compuserve.com


In order for us to develop the tecchnical program as quickly as possible, it
would be very useful if you would e-mail us as soon as possible with your proposed title and preferred method of presentation. Furthermore, if you would like to have your abstract displayed on the SIMS WWW page (lots of exposure for your work, over 6000 visits by SIMS researchers in the last 6 months) send an electronic version (in addition to the camera ready version for the proceedings booklet) via email to:


Greg Gillen
NIST
Phone: 301-975-2190
FAX: 301-975- 1134
Email: greg.gillen@nist.gov

An exhibition area featuring table top displays will be available at the meeting. Manufactures of SIMS instrumentation , accessories, ion sources, detectors, surface profilometers, vacuum equipment, sample preparation equipment and materials characterization labs are encouraged to participate. There is also an opportunity to give oral sales presentations in conjunction with a special vendor-sponsored dinner. For more information please contact:

Fred Stevie
AT&T Microelectronics
Phone: 407-345-7626
Fax: 407-345-6999
Email: attme!orfas.att.com

Program for the 9th Annual Workshop on SIMS

For questions about the technical program please contact a member of the organizing committee. For any other questions please contact the conference office.

Greg Gillen
NIST
Phone: 301-975-2190
FAX: 301-975- 1134
Email: greg.gillen@nist.gov

Steve Hues
Motorola
Phone: 512-933-7333
Fax: 512-933-2511
Email: steven_hues-RA3775@email.sps.mot.com

Richard Lareau
Army Research Laboratory
Phone: 908-532-0119
Fax: 908-427-3576
Email: RLareau@Ftmon.ARL.Mil

Fred Stevie-Vendor Exhibits Coordinator
AT&T Microelectronics
Phone: 407-345-7626
Fax: 407-345-6999
Email: attme!orfas.att.com


Gerry Scilla- Local Arrangements
IBM
Phone: (802) 769-1882
Fax: (802) 769-1220
Email: GSCILLA @ VNET.IBM.COM


Conference Office
SIMS Workshop
1201 Don Diego Avenue
Santa Fe New Mexico 87505
Phone: 505-989-4735
Fax: 505-989- 1073
Email: 70404.2407@compuserve.com

Program From the 1995 Annual SIMS Workshop