|
WORKSHOP AGENDA
Subject to Change / Updates
|
|
Download DOC
PDF
|
17th
Annual Workshop on
Secondary
Ion Mass Spectrometry
|
|
Organizing Committee:
Greg Gillen, NIST - Chairman
Steven Hues, Motorola - Chairman
Richard Lareau, Transportation Security Administration - Chairman
Technical Program
|
 |
|
|
7:00 - 10:15 PM |
Opening RECEPTION,
REGISTRATION
and Exhibit Setup |
| |
|
 |
|
|
7:30 - 8:00 AM |
Continental Breakfast |
| 8:00 -
8:15 AM |
Welcome and Introductions |
|
|
|
Plenary Session
(Chair: Workshop Organizers) |
|
8:15 - 8:45 AM |
"Ion Beam
Damage During Sputtering",
Linda Dake, Utica College |
|
8:45 - 9:15 AM |
"Organic Analysis by TOF SIMS", Scott Bryan, PHI |
|
9:15 - 10:15 AM |
"SIMS Quantification for Depth Profiling Overview, Recent Results for Surfaces and Insulators, and Current Problems", Fred Stevie, North Carolina State University |
|
10:15 -10:35 AM |
Morning Break |
|
|
|
Cluster
SIMS
Chairs Nick Winograd and John Vickerman |
|
10:35 - 11:05 AM |
"Polyatomic Ion Beams for ToF-SIMS - Prospects and
Challenges", John Vickerman, UMIST |
|
11:05 - 11:25 AM |
"Massive Gold
Clusters as Projectiles for SIMS", Emile Schweikert, Texas A&M |
|
11:25 - 11:45 AM |
"Molecular Depth Profiling of Polymer Multilayers by Time of Flight Secondary Ion Mass Spectrometry", Matt
Wagner, NIST |
|
11:45 - 12:05 PM |
"XPS Depth profiling with
C60", Scott Bryan, PHI |
|
12:05 - 12:25 PM |
"TOF-SIMS Imaging with a
C60
Probe", Nick Winograd, Penn State |
|
12:25 - 12:45 PM |
"Fundamentals and Applications of a New Bi-Cluster Liquid Metal Ion Source", F. Kollmer, ION- TOF GmbH |
|
12:45 - 1:45 PM |
Lunch |
| |
|
| |
|
SIMS for Insulator Analysis/Isotopic and Geological Analysis
(Chair: Albert Fahey) |
| 1:45
-
2:05 PM |
"Isotopic Measurements of Uranium", Albert Fahey, NIST |
| 2:05
-
2:25 PM |
"Interactions of Gaseous Nitric Acid with Surfaces of Environmental
Interest", D.J. Gaspar, Pacific Northwest National Laboratory |
| 2:25 -
2:55 PM |
"Determining
Relative Sensitivities for Metals in Volcanic Glass using TOF-SIMS", Ed Vincenze, Smithsonian Institution |
| 2:55
- 3:15 PM |
"Magnetic Sector Analysis of Bulk Insulators Using
O2+
Primary Beam With Electron Beam Adjacent to Analysis Area", Fred Stevie,
North Carolina State University |
| 3:15 -
3:30 PM |
Afternoon Break |
| |
|
Vendor Technical Session
(Chair: Fred Stevie, NC State University) |
| 3:30
- 3:50 PM |
"Introduction to
the new Cameca IMS 7F and IMS 1280", Michel Schuhmacher |
| 3:50
- 4:10 PM |
Physical
Electronics |
| 4:10
- 4:30 PM |
ION-TOF |
| 4:30
- 5:10
PM |
SIMS Workshop Business Meeting and ASTM Meeting-ASTM Chair Christine Mahoney
Discussion of Standards Needs for Biomaterials/Pharmaceuticals/Semiconductors
Dave Simons - Semiconductor Industry
Scott Bryan - Biomaterials and Pharmaceuticals
Kathy Lloyd - Organics and Polymers
Albert Fahey -Instrument Standards |
|
Instrument User Meetings
|
|
5:10 - 6:30 PM |
Tentative: Cameca, Ion TOF, PHI |
|
6:30 - 7:00 PM |
Social Mixer |
| |
|
|
7:00 - 10:00 PM
Vendor
Sponsored Banquet and
After Dinner Presentations
Chairs: Fraser Reich, Kore Technology and Fred Stevie, NC State University
|
|
After dinner sales presentations
|
|
| |
|
 |
|
|
7:30 - 8:00 AM |
Continental Breakfast |
| |
|
Semiconductor Characterization
(Joe Bennett and Jerry Hunter) |
| 8:00
- 8:30 AM |
"Depth Profiling As in SiGe", Paul Ronsheim, IBM |
| 8:30
- 8:50 AM |
"Variations in B and As RSFs in HfSiO Films",
Meredith Beebe, International SEMATECH |
| 8:50
- 9:10 AM |
"Data Processing Complexity of Depth Profiles in Compositionally Varying Layers", Temel H. Buyuklimanli, Evans East |
| 9:10
- 9:30 AM |
"Characterization of SiON Gate Dielectrics by SIMS: Comparison of TOF and Dynamic SIMS Measurements", Gary Mount, Charles Evans
& Associates |
| 9:30- 9:50
AM |
"Boron Depth Profiles Using a Magnetic Sector with Impact Energies Down to 200 eV", STMicroelectronics, |
| 9:50 - 10:20
AM |
Morning Break |
| |
|
Biomaterials Characterization
(Chair: Christine Mahoney and Matt Wagner) |
|
10:20 - 10:40 AM |
"TOF-SIMS Analysis of Model Biomaterial Surfaces: What
We Can Learn from SIMS on SAMs", Dan Graham, University of Washington |
|
10:40 - 11:00 AM |
"Characterization
of Bacillus Endospores studied by TOF-SIMS",
Kuang Jen Wu, Lawrence Livermore National Laboratory |
|
11:00 - 11:20 AM |
"ToF-SIMS
Analysis of Commercial Hydrogels Using Cryogenic Sample Handling
Techniques", Daniel
J. Hook, Bausch and Lomb |
|
11:20 - 11:40 AM |
"Depth Profiling in PLLA/Pluronic Blends using Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)", Christine Mahoney, NIST |
|
11:40 - 12:00 PM |
"Characterization of Peptides in Films and on Beads with
C60",
Juan Cheng, Penn State |
| 12:00
- 1:00 PM |
Lunch |
| |
|
|
TOF SIMS - ( ) |
| 1:00
- 1:20 PM |
"Investigations of Contamination in the Surface Analysis Lab", Michaelleen L. Pacholski, Rohm and Hass |
| 1:20
- 1:40 PM |
"TOF-SIMS Chemical Imaging Applications in the Pharmaceutical Industry", Kurt Wolf, Evans East. |
| 1:40
- 2:10 PM |
"Qualitative Comparison of Bulk and Surface Modifcations of x-Irradiated
PTFE", Gregory Fisher, Los Alamos National Lab. |
| |
|
| |
|
Molecular Dynamics/Fundamentals
(Chair: Peter Williams, ASU)
|
|
2:30 - 2:50 PM
|
"Formation and Emission of Ions from Water Ice Bombarded by Energetic Particles", Barbara Garrison, Penn State |
|
2:50 - 3:10 PM
|
"Microscope Insights into the Sputtering of Ag(111) Induced by
C60 and Ga+ Bombardment", Edward Smiley, Penn State University |
|
3:10 - 3:30 PM
|
"Principal and Resolved Factors in SIMS Data Interpretation: PCA and MCR" , Richard Ericson, 3M |
|
3:30 - 3:50 PM
|
"Dependence of Ion Beam Induced Segregation of Gold in Silicon on the Concentration and Distribution
of Near Surface Oxygen", Richard Sobers, ASU |
4:00 - 5:30 PM
Poster Session
(Chair: TBD)
|
|
1. “Application of Time Interpolation to SIMS Isotopic Ratio
Measurements", David Simons and Kevin Coakley, NIST
2. “Thermal Stability of Si and Mg-Implanted GaAs and
InP under High-energy Laser Annealing as Evaluated by SIMS", Peter Chi, NIST
3. “SIMS
Backside Analysis: Sample Preparation and Application”, Eric Windsor,
NIST
4. “SIMS Support for the Development of BiCMOS process
and its Transfer to Manufacturing by Developing in-line
Monitoring Capabilities”, T. Budri, National Semiconductor
5. “A Comparison of Quadrupole, Magnetic Sector and
TOF-SIMS for Sodium Analysis in a Flat Panel Display Glass
and in Silica Coated Flat Panel Display Glass”, G.
Guryanov, Corning.
6. “Determination of Silicon Content in Hafnium
Silicates”, Joe Bennett, International Sematech
7. “3D Molecular Imaging”, Greg Gillen, Matt Wagner,
Christine Mahoney, NIST
8. “Initial Results with the ExxonMobil NanoSIMS",
W.C.
Horn, W.A. Lamberti, ExxonMobil
Research &
Engineering Company
9. "Using
ToF-SIMS as a High Throughput Screening Tool for
Light-Weight Hydrogen Storage Materials", V.S.
Smentkowski,
and J.P. Lemmon, General Electric Global Research Center
10. “Cluster Primary Ion Bombardment Facilitates ToF-SIMS
Analysis of
Biological/Tissue Samples”,
V.S.
Smentkowski1,
A. Schnieders2, F. Kollmer3, R.
Kersting4, J.A. Ohlhausen5, P.G.
Kotula5, and M.R. Keenan5, General Electric Global Research Center
11. “Multi-ion Emission from Massive Gold Cluster
Impacts”, G.
J. Hager,
R. D. Rickman, S. V. Verkhoturov, and E. A. Schweikert Texas
A&M University
12. “Secondary Ion and Coincidental Ion Yields Produced
by keV Polyatomic Carbon Clusters”, J.
E. Locklear,
S.V. Verkhoturov, and E.A. Schweikert, Texas A&M
University
13. "SIMS Depth Profiles of SiGe Layers in Fully
Processed Si Wafers", Y.H. Lu, Taiwan Semiconductor
14.
“Numerical Approach for Resolving Mass
Interferences in Ion Mass Spectrometry”, Alexander
Pivovarov, Shiva Technologies Inc
15. “SIMS
Study of Ta/Cu and Co/Cu Nanostructures”, R. Liu,
Department of Physics, National University of Singapore
16. “Qualitative Comparison of Bulk and Surface
Modification of a-Irradiated PTFE”, Gregory Fisher, Los
Alamos National Laboratory
17. “Comparative Analysis of Pt/Ru Catalyst Sample
using TOF-SIMS and Laser SNMS”, A. Schnieders, Ion TOF,
USA
18. “Fluorine
Chamber Contamination in Dynamic SIMS Quadrupole
Instruments”, C. Blackmer-Krasinki, Micron Technology
"Development
of a Thermo-Ionization Source for Efficient Imaging of
Alkaline Earth Elements and Metal Containing Molecules”
Christelle Guillimier
"Quantitative
Analysis of Hydrogenated Amorphous Silicon-Germanium
Alloys",
Robert Reedy, NREL
"Understanding
Oxygen Enhancement of Secondary Ion Yields of Silicon:
Comparison of Experimental Results from Si and Theoretical
Model", J. Lorincik, ASU
"Multiply
Charged Molecular Ions Produced by Sputtering", K. Franzreb,
ASU
"Mapping
Applications of Full Wafer SIMS for sub-90nm Semiconductor
Technology", M. Juhel, STM Microelectronics
|
|
|
|
|
6pm |
Workshop Excursion and Dinner - Location to be determined |
|
|
|
 |
|
|
7:30 - 8:00 AM |
Continental Breakfast |
| |
|
Imaging
Chairman (Greg Gillen, NIST) |
|
8:00 - 8:20 AM |
"NanoSIMS Applications in Catalysis", W.A. Lamberti, ExxonMobil Research & Engineering Company |
|
8:20 - 8:40 AM
|
"High Spatial Resolution Imaging of Biological Tissues", Claude Lechne, Harvard
Medical School |
|
8:40 - 9:10 AM
|
"Analysis of TOF-SIMS Spectral Series and Spectral Image Series Using AXSIA" , Tony Ohlhausen, Sandia National Laboratory |
|
9:10 - 9:30 AM
|
"Large Area TOF-SIMS Chemical Mapping: Opportunities and Challenges", Kathy Lloyd, Dupont Corporate Center |
|
9:30 - 9:50 AM
|
"High Lateral Resolution SIMS in Material Science: Various Applications of the
NanoSIMS", F. Horreard, Cameca |
|
9:50 - 10:10 AM
|
Morning Break |
| |
|
Instrumentation
(Chairman- Steve Hues, Motorola)
|
|
10:10 - 10:30 AM |
"Towards Isotope Ratio Measurement with an Electrometer Array on the Cameca IMS xf" Peter Williams, Arizona State University |
|
10:30 - 10:50 AM |
"Eucentric Rotating Stage for Cameca IMS-wF and
Sc-Ultra", P. Peres, Cameca |
|
10:50 - 11:10 AM |
“Full
Wafer Analysis of Ion Implanted Wafers”, Drew Evans, Full
Wafer Analysis |
|
11:10 - 11:30 AM |
"Development of
C60
Ion Beam Systems", Rowland Hill, Ionoptika |
|
11:30 - 11:50 AM |
"TOF SIMS Studies Using a Newly Developed C60+ Primary Ion Gun: Fundamental Aspects and
Applications", Rudolf Mollers, Ion -TOF |
|
11:40 - 12:10 PM |
"The Carnegie Super SIMS: A Progress Report", L.R. Nittler, Carnegie Institution |
| |
|
|
12:10 PM |
Closing Remarks |
|
|
Download DOC
PDF
|
|
Page Date Thursday, October 07, 2004 03:51 AM
|
