19^th Annual Workshop on

Secondary Ion Mass Spectrometry

 

Organizing Committee:

 

Steven Hues, Micron Technology - Chairman

Greg Gillen, NIST - Chairman

Richard Lareau, DHS, Science & Technology - Chairman

Tuesday – May 16, 2006

 

Tutorial Program

 

9:00 – 10:00               Joe Bennett (ATDF) "Characterization of High-k and Low-k Dielectric Materials Using SIMS"

 

10:00 – 10:30 Break

 

10:30 – 11:30              Fred Stevie (NCSU) Backside SIMS Analysis

 

11:30 – 1:00    Lunch

 

 1:00 – 2:00                 Birgit Hagenhoff (Tascon) A Practical Guide to SIMS Analysis of Organic Materials"

 

 2:00 – 3:00     Nick Winograd ( Penn State ) Mechanistic Aspects of Cluster SIMS

 

 3:00 – 3:30     Break

 

 3:30 – 4:30                 John Vickerman (The University of Manchester ) Opportunities and Challenges of Bioimaging Analysis

 

6:00-10:00 PM            Opening reception and registration

 

 

Wednesday – May 17, 2006

 

Technical Program

 

 

7:00 - 8:00 AM            Continental Breakfast

                                               

8:00 - 8:10 AM            Welcome and Introductions

 

8:10 - 8:40 AM             "Imaging and Differentiation of Cells and Tissues by ToF-SIMS", Kuang Jen Wu, Lawrence Livermore National Lab

 

8:40 - 9:10 AM             “Desorption Electrospray Ionization: Mechanisms and Applications”

Andre Venter, Purdue University

 

9:10 - 9:40 AM             “DART: A New Desorption/Ionization Mass Spectral Technique that

            can be used for the Analysis of Organics on Conventional and

            Nonconventional Surfaces” David Sparkman Consultant to JEOL

 

9:40 – 9:55 AM            Morning Break

 

                                           Nanomaterials and SIMS (Chair: Amy Walker)

 

9:55 - 10:15 AM          “SIMS of Nanoparticles”- Dan Gaspar, UMIST

 

10:15 - 10:35 AM        “The Identification of Reactants and Products in a Modified Polymer Material “Greg Fisher, PHI

 

10:35 - 10:55 AM         “Analysis of Thin Organic Films using Gold Cluster and C₆₀ Ion Beams”, Scott Bryan, PHI

 

10:55 - 11:15 AM        “Nanoparticle-Enhanced SIMS (NE-SIMS) Imaging of Peptides on Self-Assembled Monolayers” Tae Geol Lee, Korea Research Institute of Standards and Technology

 

11:15 – 11:35               “UV Photopatterned Self-Assembled Monolayers:

Applications in Molecular/Organic Electronics and

Biomaterials” ‘ Chuanzhen Zhou , Washington University

 

 

11:35 – 12:45 PM         Lunch

                                                     

Isotopic Metrology (Chair: Al Fahey)

 

12:45- 1:30 PM           “Electrostatic Peak Switching at High Mass Resolution”, Georges Slodzian, Universite Paris Sud

 

1:30- 1:50 PM             “Precision Isotopic Measurements of Anthropogenic Uranium with the CAMECA IMS-1270” Al Fahey, NIST

                                                                       

1:50 – 2:10 PM           "The UCLA MegaSIMS: an accelerator secondary ion mass

                                    spectrometer for the analysis of captured solar wind”, Kevin

                                    McKeegan, UCLA

 

2:10 – 2:30 PM           “SIMS Analysis of Polymers Labeled with Deuterium and ¹³C” Shane Harton, NCSU

 

2:30 – 2:45 PM           Break

 

Fundamentals (Chair: Peter Williams)

 

2:45 – 3:05 PM           “Dependence of Ion Yield Enhancement on Temperature and Time in MetA-S-SIMS” Roel De Mondt, University of Antwerp

 

3:05 – 3:25 PM           “Prompt In-Situ Emission of Gold Adducts from Single Impacts of Large Gold Clusters on Organic Solids” C. Guillermier, Texas A&M University

 

3:25 - 3:45 PM            “Oxygen-Induced Chemical Surface Segregation during SIMS Depth Profiling” Richard Sobers Jr., Arizona State University

 

3:45 - 4:05 PM            Panel Discussion on Ionization Phenomena in Molecular SIMS

 

 

Backside SIMS Analysis (Chair: Fred Stevie)

 

 4:05 – 4:25 PM     “Thermal Stability Studies of High-k Gate stacks using Backside SIMS”

Robert Wallace, University of Texas at Dallas

 

4:25 - 4:45 PM      “Device-Specific Backside SIMS Sample Preparation” Paul Ronsheim, IBM

 

4:45 - 5:05 PM       “Backside SIMS Applied to the Study of High-k Layer Intermixing“ Joe 

                               Bennett, ATDF

 

 

Instrument Users Meetings

 

5:15 – 6:30 PM           Cameca, Ion TOF, PHI

 

Vendor Dinner

 

6:30 - 7:00 PM            Social Mixer  

 

7:00 - 10:00 PM          Vendor Dinner  

 

 

Posters

 

“Nanovolume Analysis with SIMS Using Massive Projectiles” Zhen Li, Stanislav V. Verkhoturov, Emile A. Schweikert, Texas A&M University

 

“Practical Methods of Improving Productivity in a SIMS Laboratory”, Jeff Chen and Stephen Schauer, Freescale Semiconductor

 

“CN^- Emission under C60 Bombardment” J.E. Locklear, C. Guillermier, S.V. Verkhoturov, and E.A. Schweikert, Texas A&M University

 

“Characterization of Gunpowder Samples with Time-of-Flight Secondary Ion Mass Spectroscopy (TOF-SIMS)” Christine Mahoney, Greg Gillen, and Albert Fahey, NIST

 

“Cluster dependence of Secondary Ion Emission” J. Matsuo, S. Ninomiya, K. Ichiki, T. Aoki, and T. Toshio, Kyoto University

 

"SIMS and Semiconductors; Current Applications for Implant Characterization" Chantelle Krasinski and Wendy Morinville, Micron Technology

 

"Molecular Depth Profiling and Dynamic Imaging with TOF-SIMS and Cluster Ion Beams" by Juan Cheng, Caiyan Lu, Shawn Parry and Nicholas Winograd", Penn State University

 

 

Thursday – May 18, 2006

 

Technical Program

 

 

7:30 - 8:00 AM Continental Breakfast

 

Semiconductors (Chair: Joe Bennett)

 

8:00 - 8:20 AM            “Oxygen Flooding Technique Application for Shallow Depth Profiling in High-k Dielectrics and SiGe Alloy-Based Structures”, A. Merkulov, Cameca

 

8:20 - 8:40 AM            “Defect Analysis: Tools for Locating and Characterizing” K.F. Willey,

Rohm and Hass Company

 

8:40 - 9:00 AM             "SIMS Research at NREL: Helping Realize Clean Energy from the

Sun", R.C. Reedy,  NREL   

 

9:00 - 9:20 AM            “Characterization of HfO₂ Films with Low Energy Cs⁺ Primary Beams in an IMS 7f SIMS” R Liu, University of Manitoba

 

9:20 - 9:40 AM            Morning Break

 

9:40 - 10:00 AM          “Combined SIMS STEM-EDX Study for the 2-D Characterization of As Dopant Profiles” J-P Barnes, CEA-DRT-Leti CEA/GRE

 

10:00 - 10:20 AM        “Investigation of Growth Characteristics of ALD Al₂O₃ Films on Thermal SiO₂ Substrates by TOF-SIMS” E. Adem, Spansion

 

10:20 - 10:40 AM        "SIMS use in Semiconductor Manufacturing at Intel" James Reinhart,

                                    Intel

 

Workshop Sponsor Session (Chair: Fred Stevie)

 

10:40-11:00 AM          Physical Electronics

                                    "New Ion Gun and Software Developments from Physical Electronics", Scott Bryan, PHI

 

11:00-11:20 AM          Cameca Instruments

 

                                    “Improvement of SIMS Analysis Repeatability in New Generation Cameca IMS-7f Instruments” P. Peres, Cameca Instruments

 

11:20-11:40 AM          ION TOF

                                    "Recent Advances in TOF-SIMS: From Cluster Ion Sources to Fully

                                    Automated Semiconductor Tools" Ewald Niehuis, ION-TOF GmbH

 

11:40- 12:50 PM         Lunch

                                   

12:50 – 1:35 PM        ASTM Meeting- (Chair: Christine Mahoney)

 

                                 "Repeatability and Constancy of the Relative Intensity Scale in Static

                                 SIMS" Ian Gilmore, National Physical Laboratory

 

Instrumentation (Chair: Scott Bryan)

                                   

1:35 - 1:55 PM        “Application of Ion Detectors in SIMS” Dave Simons, NIST

 

1:55 - 2:15 PM        “Mechanistic Study of Electron Beam Charge Compensation During

                                Magnetic Sector SIMS Profiling of Insulators with O₂⁺ Beams” Z. Zhu,

                                NCSU

 

     2:15 - 2:35 PM       “Depth Profiling with Ga⁺ Bombardment: a Comparison of Depth Profiling Results on Thin Multi–Layer Metal Stacks Analyzed with both ToF and Quadrapole SIMS” Clive Jones, Millbrook Instruments

 

2:35 - 2:50 PM          Afternoon Break         

 

 

Cluster SIMS (Chair: Chris Szakal)

 

2:50- 3:10 PM          “Cluster and Proton Formation Subsequent to the Sputtering Event” John Vickerman, The University of Manchester

 

3:10 - 3:30 PM        “Sputtering of Benzene Induced by C₆H₆, C₁₀H₈, C₂₀, C₆₀, C₁₂₀, and

                                C₁₈₀ Is Bigger Better?” E.J. Smiley, Penn State University

 

3:30 - 3:50 PM        “Using Water Ice to Quantitate SIMS Surface Sensitivity” Chris Szkal,

                                Penn State University

 

3:50 - 4:10 PM        “MCs⁺ Depth Profiling Using Cluster Primary Ions” E. Niehuis, ION-TOF

 

4:10 - 4:30 PM        “SIMS with Massive Gold Projectiles” E.A. Schweikert, Texas A&M

                                University

 

6:30- 10:00 PM      Workshop Banquet

 

                                   

Friday – May 19, 2006

 

Technical Program

 

 

7:30 - 8:00 AM            Continental Breakfast

                                               

 

             Depth Profiling of Organic Materials (Chair: Greg Gillen)

 

8:00- 8:20 AM                  “TOF-SIMS Imaging of Single Cells in a Sugar Matrix” Shawn Parry, Penn State University

 

8:20- 8:40 AM “Low Temperature Depth Profiling of Drug Eluting Stent Coatings with

Cluster SIMS” Christine Mahoney, NIST

 

8:40- 9:00 AM             Morning Break

 

 

Biological Material Characterization (Chair: Kuang Jen Wu)

 

9:00- 9:20 AM             “ToF-SIMS Characterization of Proteins on PEG Surfaces” David Castner, University of Washington

 

9:20- 9:40 AM             "Current thoughts on Bioimaging with Cluster Ion Beams", Nick Winograd, Penn State University

 

9:40 - 10:00 AM          “SIMS Analysis of Biological Materials Using Cluster Ion Sources” Birgit Hagenhoff, Tascon

 

10:00 - 10:20 AM      “Distinguishing Stereo- and Structural Isomers with ToF-SIMS and Multivariate Statistical Analysis” Elena Berman, Lawrence Livermore National Laboratory

 

10:20 - 10:40 AM        “Three Dimensional Imaging of Organic Materials Using Cluster SIMS” Greg Gillen, NIST

 

10:40 - 11:00 AM         “VUV Single-Photon Post-Ionization of Phenylalanine Desorbed by a C₆₀⁺ Ion Gun” L. Belau, Lawrence Berkeley National Laboratory

 

11:00 - 11:20 AM        “Biomaterial Analysis with Large Ar Cluster Ions” Jiro Matsuo, Kyoto University

 

11:20 - 11:40 AM        “Chemical Imaging of Biological Materials by NanoSIMS Using Isotopic and Elemental Labels” Peter Weber, Lawrence Livermore National Laboratory

                                               

11:40 – 12:00 PM       Closing Remarks

 

12:00 PM                    Close