20th Annual Workshop on SIMS

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Tentative Agenda -subject to change   >Download PDF Version here.

20th Annual Workshop on

Secondary Ion Mass Spectrometry


Organizing Committee:


Steven Hues, Micron Technology - Chairman

Greg Gillen, NIST - Chairman

Richard Lareau, DHS, Science & Technology - Chairman



Monday May 14, 2007

 Travel Day - Arrive


Tuesday May 15, 2007

Exhibitor set up 9:00 a.m. to 4:00 p.m.

8:00 a.m. Early Registration 

Tutorial Program


9:00 – 10:00 AM          Characterization of Biomaterials by TOF-SIMS, 
Belu        (Medtronics)


10:00 – 10:30 AM         Break


10:30 – 11:30 AM        Molecular Dynamics Simulations of Cluster Bombardment, Barbara Garrison ( Penn State University )


11:30 – 1:00 PM          Lunch


 1:00 – 2:00 PM          Ionization Mechanisms in SIMS, Peter Williams ( Arizona State University )


 2:00 – 3:00 PM          Kitchen Sink SIMS, Scott Bryan (Physical Electronics)


  3:00 – 3:30 PM           Break


 3:30 – 4:30 PM          Multivariate Data Analysis for TOF-SIMS, Barry Wise (Eigenvector Research)


6:00-10:00 PM             Opening reception and registration



Wednesday May 16, 2007

Technical Program

7:00 - 8:00 AM             Continental Breakfast


8:00 - 8:10 AM             Welcome and Introductions


Plenary Session

Personal Perspectives on the History of SIMS

(Chair: Dave Simons)


8:10 - 8:40 AM            Dynamic SIMS using a Magnetic Sector Instrumentation:
                                   A Brief History with Personal Reminiscences

                                   Charles A. Evans, Jr. (Evans Analytical


8:40 - 9:10 AM           Quadrupole-based Dynamic SIMS: A Brief History with
                                   Personal Reminiscences
, Charles Magee 
                                   (Evans Analytical Group)


9:10 - 9:40 AM           Static SIMS with Quads and TOFs, Nick Winograd
                                   (Penn State University)


9:40 - 10:10 AM    Ionization/Sputtering Theories and Quantitation, 
                              Pete Williams ( Arizona State University )


10:10 – 10:20 AM        Morning Break


                       Biological SIMS (Chair: Christine Mahoney)


10:20 - 10:40 AM        Chemical Imaging of Drug Eluting Coatings: Surface Analysis and Confocal Microscopy, Anna Belu (Medtronic)


10:40 – 11:00 AM        Quantitative MIMS Tomography, Claude Lechene 
(Harvard University)


11:00 – 11:20 AM        TOF SIMS for Differentiation of Cancer
Kuang Jen Wu (Lawrence Livermore
    National Laboratory)


11:20 - 11:40 AM        Applying Imaging ToF-SIMS and PCA in
   Differentiation of Mouse Embryo Tissue
   Types, Ligang Wu (UC Davis)


11:40 – 12:00 PM       Freeze-Etching Water Matrix Enhanced Sample
                                        Preparation for ToF-SIMS Imaging of Single Cells, 
                                        P. Piehowski (Penn State University)


12:00 – 1:00 PM         Lunch


Cluster SIMS (Chair: Chris Szakal)


1:00- 1:20 PM             Reaction Dynamics Following keV Cluster
                                    Bombardment, Kathleen E. Ryan 
                                    (Penn State University)


1:20- 1:40 PM            ToF-SIMS 3D Biomolecular Imaging using
(C60) Primary Ions, John Fletcher 
                                   (University of Manchester)


1:40 – 2:00 PM           SIMS with Au400 and C60 as Projectiles, 
                                    Emile Schweikert (Texas A&M University)


 2:00 – 2:20 PM           Cluster SIMS with a Hybrid Quadrupole Time-of-Flight Mass Spectrometer, Tony Carado (Penn State University)


 2:20 – 2:40 PM           Break



Chemometrics (Chair: Steve Hues)


 2:40 – 3:00 PM           Overview of the Current State of Multivariate Data Reduction, Bonnie Tyler (University of Utah)


 3:00 – 3:20 PM           Results of TOF-SIMS Chemometrics Round Robin, Albert Schnieders, (IonTOF)


 3:20 – 3:40 PM           Characterization of Adhesive Materials using Multivariate Analysis, Michaeleen Pacholski (Rohm and Haas)



New Directions in Desorption Ionization (Chair: Richard Lareau)


3:40 – 4:00 PM           Ambient Mass Spectrometry: Applications of Desorption
                                   Electrospray Ionization in Forensics, Chemistry and
Ismael Cotte-Rodríguez (Purdue University)


4:00 - 4:20 PM          The Beach, Some Heat, and Direct Ionization in Real
                                  Time, B. Musselman (IonSense)


4:20 - 4:40 PM            Fundamental Analysis of Particle Ejection from Droplet
Christin E. Palombo (Penn State University)


Instrument Users Meetings


 4:40 – 6:00 PM           Cameca, Ion TOF, PHI



6:00 - 7:00 PM             Social Mixer/Poster Viewing



Vendor Dinner


7:00 - 10:00 PM          Vendor Dinner  


Thursday May 17, 2007

Technical Program


  7:30 - 8:00 AM             Continental Breakfast


 Semiconductors (Chair: Joe Bennett)


8:00 - 8:20 AM            Quantification of P and As implants in SiGe and Ge
                                   Joe Bennett
(International SEMATECH)


8:20 - 8:40 AM            TOF-SIMS Analysis of Low K Interlevel Dielectric
                                    Materials for Semiconductor Back End of Line
Steve Molis (IBM)


8:40 - 9:00 AM           TOF-SIMS Characterization of Photoacid Redeposition
                                    in 193 nm Photoresists, Zhanping Zhang (Spansion Inc.)


9:00 – 9:20 AM            Accurate SIMS Quantification near the Surface of Ultra
                                    Shallow Implants with Capping, Alex Merkulov (Cameca)


9:20 – 9:40 AM            The Effects of Sample Aging and Unintended Cs
                                    Contamination on SIMS Dose Measurement of Low
                                    Dose Phosphorus Implants, C.R. Penley 
                                    (North Carolina State University)


9:40 – 10:00 AM          Morning Break


SIMS and FIB (Chair: Fred Stevie)


10:00 - 10:20 AM        Gas Phase Ionization Source for FIB Applications, Lucille A. Giannuzzi (FEI)


10:20 - 10:40 AM        Sample Preparation using Focused Ion Beams, 
                                    Fred Stevie (NC State University)



Workshop Sponsor Session (Chair: Fred Stevie)


10:40-11:00 AM           Physical Electronics


11:00-11:20 AM          Cameca Instruments


11:20-11:40 AM           ION TOF


11:40-12:00 PM          Evans Analytical Group


12:00- 1:00 PM           Lunch


1:00 – 1:30 PM           ASTM Meeting- (Chair: Christine Mahoney)
  Discussion on Research Directions for 
  Semiconductor Metrology



Isotopic Measurements (Chair: Albert Fahey)


1:30 - 1:50 PM            Spatially Resolved Isotopic Analysis of Martian Meteorites Using the IMS 1270, Albert Fahey (NIST)


1:50 - 2:10 PM            In-situ Measurement of Oxygen Isotope Variation in
                                    Finely Laminated Carbonate Cements Using the
                                    CAMECA IMS-1280, J. G. Blank 
                                    (University of Wisconsin)


 2:10 - 2:30 PM         High Precision and High Spatial Resolution
                                    Measurements of Si and S Isotopes using a Cameca
                                    50L NanoSIMS,
J. Wang (Carnegie Institution of


 Insulators (Chair: Fred Stevie)


2:30 – 2:50 PM           Impact of Ion Optics on Charge Neutralization, 
                                    Georges Slodzian (
University of Paris-Sud)


2:50 - 3:05 PM            Insulator Analysis with a Magnetic Sector SIMS
                                    Instrument, Frank Zhu (IBM)     


3:05 - 3:20 PM       Analysis of Insulating Materials using a Quadrupole Mass 
Spectrometer, Charles Magee (Evans Analytical Group)


3:20 - 3:40 PM       Analysis of Insulating Materials using a Time-of-Flight

                               Mass  Spectrometer, Anna Belu (Medtronics)


3:40 – 5:30 PM            Poster Session


Characterization of Polymer Drug Delivery Systems with Cluster Secondary Ion Mass Spectrometry (SIMS), Christine Mahoney (NIST)


Use of Drop-on-Demand Inkjet Printing Technology to Produce Trace Level Contamination Standards for the Semiconductor Industry, Eric Windsor (NIST)


Cluster SIMS Analysis of Fullerenes and Organic Electronics Materials, Christopher Szakal (NIST)


High Precision Ion Implant Dosimetry using TOF-SIMS, Thomas Grehl (IonTOF)


Cluster SIMS Analysis of Nanometric Thin Layer Films, Zhen Li ( Texas A&M University )


ToF-SIMS with Optical Profilometry Enhance our Understanding of the Reduction in Coefficient of Friction with Time in an Industrial Polymer Processing Environment, M. Kram (Innovia Films Ltd)


Examination of Supported Lipid Bilayers with Cluster Secondary Ion Mass Spectrometry, V. Pinnick ( Texas A&M University )


SIMS for Relative Composition and Crystallinity Measurements of Photo -Thermo -Refractive Glass, M. Klimov ( University of Central Florida )


Investigations of UV Cure on Porogen Removal in Ultra low-k Dielectrics by TOFSIMS, F. Fillot (CEA-LETI)


The Displacement and Thermal Spike Cluster Sputtering of Si (100) and 3C-SiC (100) Epi Films under Sub-keV Polyatomic SF5+ Ion Bombardment, B. Atabaev (Arifov Institute of Electronics)


Imaging and PCA Analysis of DNA Microarrays, L. J. Gamble ( University of Washington )


O2+ versus Cs+ for Na Analysis in Silica Substrate using Quadrupole-Based SIMS, Y. Guryanov (Corning Incorporated)


New Methods for Metal Deposition on Alkanethiol Self Assembled Monolayers: Towards Molecular Electronic Circuitry, Peng Lu (Washington University in St. Louis)


Statistical Data Analysis and ToF-SIMS:  Approaches and Applications for Addressing Problems in Industry, Brandon J. Kern (Dow Chemical)


Quantification of Nitrogen in Silicon and Silicon Germanium Photovoltaic Materials, R. Reedy (National Renewable Energy Laboratory)


On the Understanding of Ionization Processes during ToF-SIMS Depth Profiling by Co-Sputtering Cs and Xe, J. Brison ( University of Namur )


UV Photooxidation and Photopatterning of Alkanethiolated Self-Assembled Monolayers on GaAs (001) Surface, Chuanzhen Zhou ( Washington University in St. Louis )


GaN Surface Topography Development under Oxygen Bombardment and its Effect on Depth Resolution, Y. Guryanov ( Corning Incorporated)


Measurement of Uranium Isotopic Composition with High Sensitivity and Specificity by Secondary Ion Mass Spectrometry, David Simons (NIST)


Tomographic Atom Probe potentials in Semiconductor and Nano-scale Materials, Francois Horréard (Cameca Instruments)



6:30- 10:00 PM           Workshop Banquet


Friday, May 18, 2007

Technical Program



7:30 - 8:00 AM            Continental Breakfast



             Depth Profiling of Organic Materials (Chair: Greg Gillen)


8:00- 8:20 AM             Update on the Current Status of Cluster Depth Profiling -  Overview of Cluster SIMS Workshop, Greg Gillen (NIST)


8:20- 8:40 AM             Temperature-Controlled Depth Profiling of Atactic,
                                 Isotactic, and Syndiotactic PMMA using an SF5+
Polyatomic Ion Source, Christine Mahoney (NIST)


Open Session (Chair: Steve Hues)


8:40- 9:00 AM             ToF-SIMS Analysis of Oxidation Profiles in Elastomers, 
                                   J. Ohlhausen (Sandia National Laboratories)


9:00- 9:20 AM            Protocols for 3-Dimensional Cluster SIMS Imaging, 
                                  Nick Winograd
(Penn State University)


9:20- 9:40 AM            Imaging and Spectrometry of Differentially Charging
                                   Samples, Greg Fisher (Physical Electronics)


9:40 - 10:00 AM      SIMS Analysis Usage for Pipe Line Tube
                      Protection against Hydrogen
Illness, A.M.
                      Mirzoev (
Bauman Moscow State 
                      Technical University)


10:00 – 10:20 AM        Morning Break


10:20 – 10:40 AM      Fundamental Studies on the Emission of Secondary
                                      Ions from Molecular Overlayers on Polyethylene
                                      Surfaces using Bismuth and C60
Primary Ion Clusters,
                                       E. Niehuis (IonTOF)


10:40 - 11:00 AM        Depth Profiling of Genesis Solar Wind Collectors with
                                    Laser Post-
Ionization SNMS: First Results, E. Tripa
                                   (Argonne National Laboratory)


11:00 - 11:20 AM        Detection of Explosives, Chemical Warfare Agents, and
                                   Drugs Using
Single Particle Aerosol Mass Spectrometry,
                                   George R. Farquar
(Lawrence Livermore 
                                   National Laboratory)


11:20 – 11:40 PM    Comparative Investigation of Nanoparticles by
S. Rajagopalachary
                                (Texas A&M University)


11:40 – 12:00 PM       Closing Remarks


12:00 PM                    Close