Program
Tentative Agenda -subject to
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20th Annual Workshop on
Secondary Ion Mass
Spectrometry
Organizing Committee:
Steven
Hues, Micron Technology - Chairman
Greg Gillen, NIST - Chairman
Richard
Lareau, DHS, Science & Technology -
Chairman
Monday May 14, 2007
Travel Day - Arrive
Tuesday May 15, 2007
Exhibitor set up 9:00 a.m. to 4:00
p.m.
8:00 a.m. Early Registration
Tutorial Program
9:00
10:00 AM
Characterization of
Biomaterials by TOF-SIMS,
Anna Belu (Medtronics)
10:00
10:30 AM
Break
10:30
11:30 AM
Molecular Dynamics
Simulations of Cluster Bombardment, Barbara Garrison (
Penn
State
University
)
11:30
1:00 PM
Lunch
1:00
2:00 PM
Ionization Mechanisms in
SIMS, Peter Williams (
Arizona
State
University
)
2:00
3:00 PM
Kitchen Sink SIMS, Scott
Bryan (Physical Electronics)
3:00
3:30 PM
Break
3:30
4:30 PM
Multivariate Data Analysis
for TOF-SIMS, Barry Wise (Eigenvector Research)
Wednesday May 16, 2007
Technical Program
8:00
- 8:10 AM
Welcome and Introductions
Plenary
Session
Personal
Perspectives on the History of SIMS
(Chair:
Dave Simons)
8:10
- 8:40 AM
Dynamic SIMS using
a Magnetic Sector Instrumentation:
A Brief History with Personal Reminiscences,
Charles A. Evans, Jr. (Evans Analytical Group)
8:40
- 9:10 AM Quadrupole-based
Dynamic SIMS: A Brief History with
Personal Reminiscences,
Charles Magee
(Evans Analytical Group)
9:10
- 9:40 AM
Static
SIMS with Quads and TOFs, Nick Winograd
(Penn
State
University)
9:40
- 10:10 AM
Ionization/Sputtering
Theories and Quantitation,
Pete Williams (
Arizona
State
University
)
10:10
10:20 AM
Morning Break
Biological SIMS (Chair: Christine Mahoney)
10:20
- 10:40 AM
Chemical Imaging of Drug
Eluting Coatings: Surface Analysis and Confocal Microscopy, Anna Belu
(Medtronic)
10:40
11:00 AM
Quantitative MIMS Tomography, Claude Lechene
(Harvard
University)
11:00
11:20 AM
TOF
SIMS for Differentiation of Cancer
Cells, Kuang Jen Wu (Lawrence
Livermore
National Laboratory)
11:20
- 11:40 AM
Applying
Imaging ToF-SIMS and PCA in
Differentiation of Mouse Embryo Tissue
Types, Ligang Wu (UC Davis)
11:40
12:00 PM
Freeze-Etching Water
Matrix Enhanced Sample
Preparation for ToF-SIMS Imaging of Single Cells,
P. Piehowski (Penn
State
University)
12:00 1:00 PM
Lunch
Cluster SIMS
(Chair: Chris Szakal)
1:00-
1:20 PM
Reaction Dynamics Following keV Cluster
Bombardment, Kathleen E. Ryan
(Penn
State
University)
1:20-
1:40 PM
ToF-SIMS
3D Biomolecular Imaging using
Buckminsterfullerene
(C60) Primary Ions, John Fletcher
(University
of
Manchester)
1:40
2:00 PM
SIMS
with Au400 and C60 as Projectiles,
Emile Schweikert (Texas
A&M
University)
2:00
2:20 PM
Cluster
SIMS with a Hybrid Quadrupole Time-of-Flight Mass Spectrometer, Tony
Carado (Penn
State
University)
2:20
2:40 PM
Break
Chemometrics
(Chair: Steve Hues)
2:40
3:00 PM
Overview
of the Current State of
Multivariate
Data Reduction, Bonnie Tyler (University
of
Utah)
3:00
3:20 PM
Results
of TOF-SIMS Chemometrics Round Robin, Albert Schnieders,
(IonTOF)
3:20
3:40 PM
Characterization of
Adhesive Materials using Multivariate Analysis, Michaeleen Pacholski (Rohm and Haas)
New Directions in
Desorption Ionization (Chair: Richard Lareau)
3:40
4:00 PM
Ambient Mass Spectrometry:
Applications of Desorption
Electrospray Ionization in Forensics, Chemistry and
Biology, Ismael
Cotte-Rodrνguez
(Purdue University)
4:00
- 4:20 PM The Beach, Some
Heat, and Direct Ionization in Real
Time, B. Musselman (IonSense)
4:20
- 4:40 PM
Fundamental
Analysis of Particle Ejection from Droplet
Impact, Christin
E. Palombo (Penn
State
University)
Instrument Users
Meetings
4:40
6:00 PM
Cameca, Ion TOF,
PHI
6:00
- 7:00 PM
Social Mixer/Poster
Viewing
Vendor Dinner
7:00 -
10:00 PM
Vendor
Dinner
Thursday May 17, 2007
Technical Program
7:30
- 8:00 AM
Continental Breakfast
Semiconductors (Chair: Joe Bennett)
8:00
- 8:20 AM
Quantification
of P and As implants in SiGe and Ge,
Joe Bennett (International
SEMATECH)
8:20
- 8:40 AM
TOF-SIMS Analysis
of Low K Interlevel Dielectric
Materials for Semiconductor Back End of Line
Applications, Steve
Molis (IBM)
8:40
- 9:00 AM
TOF-SIMS
Characterization of Photoacid Redeposition
in 193 nm Photoresists, Zhanping Zhang (Spansion Inc.)
9:00
9:20 AM
Accurate SIMS Quantification near the Surface of Ultra
Shallow Implants with Capping, Alex Merkulov (Cameca)
9:20
9:40 AM
The Effects of Sample Aging and Unintended Cs
Contamination on SIMS Dose Measurement of Low
Dose Phosphorus Implants, C.R. Penley
(North Carolina
State
University)
9:40 10:00 AM
Morning Break
SIMS and FIB
(Chair: Fred Stevie)
10:00
- 10:20 AM
Gas Phase
Ionization Source for FIB Applications,
Lucille A. Giannuzzi (FEI)
10:20 - 10:40 AM
Sample Preparation
using Focused Ion Beams,
Fred Stevie (NC State
University)
Workshop
Sponsor Session (Chair: Fred Stevie)
10:40-11:00
AM
Physical
Electronics
11:00-11:20
AM
Cameca
Instruments
11:20-11:40
AM
ION
TOF
11:40-12:00 PM
Evans Analytical Group
12:00-
1:00 PM
Lunch
1:00
1:30 PM
ASTM
Meeting- (Chair: Christine Mahoney)
Discussion on Research Directions for
Semiconductor Metrology
Isotopic
Measurements (Chair: Albert Fahey)
1:30
- 1:50 PM
Spatially
Resolved Isotopic Analysis of Martian Meteorites Using the IMS 1270,
Albert Fahey (NIST)
1:50
- 2:10 PM
In-situ Measurement
of Oxygen Isotope Variation in
Finely Laminated Carbonate Cements Using the
CAMECA IMS-1280, J. G. Blank
(University
of
Wisconsin)
2:10
- 2:30 PM
High
Precision and High Spatial Resolution
Measurements of Si and S Isotopes using a Cameca
50L NanoSIMS, J.
Wang (Carnegie Institution
of
Washington)
Insulators
(Chair: Fred Stevie)
2:30
2:50 PM
Impact
of Ion Optics on Charge Neutralization,
Georges Slodzian (University
of Paris-Sud)
2:50
- 3:05 PM
Insulator
Analysis with a Magnetic Sector SIMS
Instrument, Frank Zhu (IBM)
3:05
- 3:20 PM
Analysis
of Insulating Materials using a Quadrupole Mass
Spectrometer, Charles Magee (Evans Analytical Group)
3:20
- 3:40 PM
Analysis
of Insulating Materials using a Time-of-Flight
Mass Spectrometer,
Anna
Belu (Medtronics)
3:40
5:30 PM Poster
Session
Characterization
of Polymer Drug Delivery Systems with Cluster Secondary Ion Mass
Spectrometry (SIMS), Christine
Mahoney (NIST)
Use
of Drop-on-Demand Inkjet Printing Technology to Produce Trace Level
Contamination Standards for the Semiconductor Industry, Eric Windsor
(NIST)
Cluster
SIMS Analysis of Fullerenes and Organic Electronics Materials,
Christopher Szakal (NIST)
High Precision Ion
Implant Dosimetry using TOF-SIMS, Thomas Grehl (IonTOF)
Cluster
SIMS Analysis of Nanometric Thin Layer Films, Zhen Li (
Texas
A&M
University
)
ToF-SIMS
with Optical Profilometry Enhance our Understanding of the Reduction
in Coefficient of Friction with Time in an Industrial Polymer
Processing Environment, M. Kram (Innovia Films Ltd)
Examination
of Supported Lipid Bilayers with Cluster Secondary Ion Mass
Spectrometry, V. Pinnick (
Texas
A&M
University
)
SIMS
for Relative Composition and Crystallinity Measurements of Photo
-Thermo -Refractive Glass, M. Klimov (
University
of Central
Florida
)
Investigations
of UV Cure on Porogen Removal in Ultra low-k Dielectrics by TOFSIMS, F.
Fillot (CEA-LETI)
The
Displacement and Thermal Spike Cluster Sputtering of Si (100) and
3C-SiC (100) Epi Films under Sub-keV Polyatomic SF5+
Ion Bombardment, B. Atabaev (Arifov Institute of Electronics)
Imaging
and PCA Analysis of DNA Microarrays, L. J. Gamble (
University
of
Washington
)
O2+
versus Cs+ for Na Analysis in Silica Substrate using
Quadrupole-Based SIMS, Y.
Guryanov (Corning Incorporated)
New
Methods for Metal Deposition on Alkanethiol Self Assembled Monolayers:
Towards Molecular Electronic Circuitry, Peng Lu (Washington
University in St. Louis)
Statistical
Data Analysis and ToF-SIMS: Approaches
and Applications for Addressing Problems in Industry, Brandon J. Kern
(Dow Chemical)
Quantification
of Nitrogen in Silicon and Silicon Germanium Photovoltaic Materials,
R. Reedy (National Renewable Energy Laboratory)
On
the Understanding of Ionization Processes during ToF-SIMS Depth
Profiling by Co-Sputtering Cs and Xe, J. Brison (
University
of
Namur
)
UV
Photooxidation and Photopatterning of Alkanethiolated Self-Assembled
Monolayers on GaAs (001) Surface, Chuanzhen Zhou (
Washington
University
in
St. Louis
)
GaN
Surface Topography Development under Oxygen Bombardment and its
Effect on Depth Resolution, Y. Guryanov (
Corning
Incorporated)
Tomographic
Atom Probe potentials in Semiconductor and Nano-scale Materials, Francois
Horrιard (Cameca Instruments)
6:30- 10:00 PM
Workshop Banquet
Friday, May 18, 2007
Technical Program
7:30 - 8:00 AM
Continental Breakfast
Depth Profiling of
Organic Materials (Chair: Greg Gillen)
8:00-
8:20 AM
Update
on the Current Status of Cluster Depth Profiling - Overview of
Cluster SIMS Workshop, Greg Gillen (NIST)
8:20-
8:40 AM
Temperature-Controlled Depth Profiling of Atactic,
Isotactic, and Syndiotactic PMMA using an SF5+
Polyatomic Ion Source, Christine Mahoney (NIST)
Open Session (Chair:
Steve Hues)
8:40-
9:00 AM
ToF-SIMS
Analysis of Oxidation Profiles in Elastomers,
J. Ohlhausen (Sandia National Laboratories)
9:00- 9:20 AM
Protocols
for 3-Dimensional Cluster SIMS Imaging,
Nick Winograd (Penn
State University)
9:20- 9:40 AM
Imaging
and Spectrometry of Differentially Charging
Samples, Greg Fisher
(Physical Electronics)
9:40
- 10:00 AM SIMS Analysis
Usage for Pipe Line Tube
Protection against Hydrogen Illness, A.M.
Mirzoev (Bauman Moscow
State
Technical University)
10:00 10:20 AM
Morning Break
10:20
10:40 AM
Fundamental Studies on the
Emission of Secondary
Ions from Molecular Overlayers on Polyethylene
Surfaces using Bismuth and C60 Primary
Ion Clusters,
E. Niehuis (IonTOF)
10:40
- 11:00 AM
Depth Profiling of Genesis Solar Wind Collectors with
Laser Post-
Ionization
SNMS: First Results, E. Tripa
(Argonne National Laboratory)
11:00 - 11:20 AM
Detection
of Explosives, Chemical Warfare Agents, and
Drugs Using Single Particle Aerosol Mass
Spectrometry,
George R. Farquar (Lawrence Livermore
National Laboratory)
11:20
11:40 PM Comparative
Investigation of Nanoparticles by
Cluster-SIMS, S. Rajagopalachary
(Texas A&M University)
11:40 12:00 PM
Closing Remarks
12:00 PM
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