| Contamination management is one of the key parameters for the development of micro and nanotechnologies. ToF-SIMS is
now one of the most powerful techniques able to address this task and is increasingly used for its high sensitivity, high surface and depth
resolution and its imaging capabilities.
This PhD subject is aimed at the development of new analytical methodologies using ToF-SIMS for the quantification of contamination in
novel materials for micro and nanotechnologies, such as Low-K or High-K dielectrics.
This work will take place in one of the founding laboratories of the Nanocharacterisation Platform at MINATEC.
http://www.minatec.org/
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